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Spectroscopic ellipsometry and its intersection with interferometry

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»ã±¨ÌáÒª£ºBoth spectroscopic ellipsometry and interferometry are powerful non-contact and non-destructive optical techniques used for characterization surfaces and bulk materials. In contrast to interferometry that is based on measuring of intensity distribution in an interference pattern, ellipsometry deals with analysis of the state of polarization of the light interacted with a sample. Basics of the ellipsometric methods will be presented. A few experimental setups that can be assembled in the Lab of Applied Optics and Metrology and be combined with the existed interferometric facility for investigation of surfaces, thickness measurements, study of indexes of refraction and anisotropy will be discussed.